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Summary
| Description | A 36 nm pitch horizontal two-bar structure exhibits significant CD difference (between upper and lower bar as a function of focus. This has been attributed to the shadowing effect of the EUV illumination. Ref.: V. Philipsen et al., Proc. SPIE vol. 10143, 1014310 (2017). |
| Date | |
| Source | Excel |
| Author | Guiding light |
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Original upload log
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| Date/Time | Dimensions | User | Comment |
|---|---|---|---|
| 2017-06-20 12:47:50 | 481 × 288 | Guiding light | Uploading a self-made file using [[Wikipedia:File_Upload_Wizard|File Upload Wizard]] |
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| Date/Time | Thumbnail | Dimensions | User | Comment | |
|---|---|---|---|---|---|
| current | 21:36, 11 May 2018 | | 481 × 288 (8 KB) | Willy1018 | Transferred from en.wikipedia (MTC!) (1.1.0) |
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