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Summary
| Description |
English: The images from small angle illumination and large angle illumination are different in the EUV reflective optical system, leading to different image positions as well as intensities. When combined, the image contrast is reduced.[1] This example is for 28 nm horizontal line pitch on a 0.33NA EUV system, with dipole leaf illumination. |
| Date | |
| Source | Own work |
| Author | Guiding light |
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References
- ↑ M. Burkhardt, Proc. SPIE 10143, 1041312 (2017).
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| Date/Time | Thumbnail | Dimensions | User | Comment | |
|---|---|---|---|---|---|
| current | 13:21, 21 January 2023 | | 481 × 289 (18 KB) | Guiding light | Uploaded own work with UploadWizard |
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